TY  - JOUR
AU  - Cho, Yong
AU  - Nguyen, Nhan
AU  - Richter, Curt
AU  - Ehrstein, James
AU  - Lee, Byoung
AU  - Lee, Jack
C2  - Applied Physics Letters
DA  - 2002-02-18 00:02:00
LA  - en
M1  - 80
PB  - Applied Physics Letters
PY  - 2002
TI  - Spectroscopic Ellipsometry Characterization of High-K Dielectric HfO<sub>2</sub> Thin Films and the High-Temperature Annealing on Their Optical Properties
ER  -