TY  - JOUR
AU  - Rice, Joseph
AU  - Rudman, David
AU  - Bang, C.
AU  - Flik, M.
AU  - Schmidt, M.
C2  - Journal of Microelectromechanical Systems
DA  - 1993-12-01 00:12:00
LA  - en
M1  - 2
PB  - Journal of Microelectromechanical Systems
PY  - 1993
TI  - Thermal Isolation of High-Temperature Superconducting Thin Films Using Silicon Wafer Bonding and Micromachining
ER  -