TY - CONF AU - Afridi, Muhammad AU - Berning, David AU - Jr., Allen Hefner AU - Suehle, John AU - Zaghloul, Mona AU - Kelley, Eric AU - Parrilla, Zharadeen AU - Hood, Colleen C2 - Proc., SEMI-THERM , San Jose, CA, USA DA - 2002-03-01 00:03:00 LA - en PB - Proc., SEMI-THERM , San Jose, CA, USA PY - 2002 TI - Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14143 ER -