TY  - CONF
AU  - Seiler, David
AU  - Shaffner, Thomas
C2  - Proc., 4th RIPE Symposium, Tokyo, 1, JA
DA  - 2001-01-01 00:01:00
LA  - en
PB  - Proc., 4th RIPE Symposium, Tokyo, 1, JA
PY  - 2001
TI  - Challenges of Metrology and Characterization Measurements for ULSI Technology
ER  -