TY  - JOUR
AU  - Wang, Yicheng
AU  - Benck, Eric
AU  - Misakian, Martin
AU  - Edamura, M.
AU  - Olthoff, James
C2  - Journal of Applied Physics
DA  - 2000-03-01 00:03:00
LA  - en
M1  - 87
PB  - Journal of Applied Physics
PY  - 2000
TI  - Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9483
ER  -