TY  - CONF
AU  - Guillaume, Nadine
AU  - Kiihamaki, J.
AU  - Karttunen, J.
AU  - Kattelus, H.
C2  - Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
DA  - 2001-03-01 00:03:00
LA  - en
PB  - Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
PY  - 2001
TI  - Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers
ER  -