TY  - CONF
AU  - Dowell, Marla
AU  - Cromer, Christopher
AU  - Jones, Richard
AU  - Keenan, Darryl
AU  - Scott, Thomas
C2  - AIP Conf. Proc., Characterization and Metrology for ULSI Technology 2000, Gaithersburg, MD, USA
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 550
PB  - AIP Conf. Proc., Characterization and Metrology for ULSI Technology 2000, Gaithersburg, MD, USA
PY  - 2001
TI  - New Developments in Deep Ultraviolet Laser Metrology for Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=17492
ER  -