TY  - JOUR
AU  - Mayo, Santos
AU  - Lowney, J
AU  - Roitman, Peter
C2  - Journal of Electronic Materials
DA  - 1993-12-31 00:12:00
LA  - en
M1  - 22
PB  - Journal of Electronic Materials
PY  - 1993
TI  - Characterization of Interface Defects in SIMOX Films
ER  -