TY  - CONF
AU  - Bertness, Kristine
AU  - Armstrong, J
AU  - Marinenko, Ryna
AU  - Robins, Larry
AU  - Paul, Albert
AU  - Pellegrino, Joseph
AU  - Amirtharaj, Paul
AU  - Chandler-Horowitz, Deane
C2  - Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing, Aventura, FL, USA
DA  - 2000-07-01 00:07:00
LA  - en
PB  - Conf. Dig., LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing, Aventura, FL, USA
PY  - 2000
TI  - AlGaAs Composition Measurements from In Situ Optical Reflectance
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26476
ER  -