TY  - CONF
AU  - DiMeo, F.
AU  - Semancik, Stephen
AU  - Cavicchi, Richard
AU  - Suehle, John
AU  - Chaparala, P
AU  - Tea, N.
C2  - Proc., Materials Research Society Symposium, Boston, MA, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 415
PB  - Proc., Materials Research Society Symposium, Boston, MA, USA
PY  - 1996
TI  - MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications
ER  -