TY  - CONF
AU  - Durgapal, P.
AU  - Ehrstein, James
AU  - Nguyen, Nhan
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-12-31 00:12:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Thin Film Ellipsometry Metrology
ER  -