TY - JOUR AU - Ozgur, Mehmet AU - Milanovic, V. AU - Zincke, C. AU - Gaitan, Michael AU - Zaghloul, Mona C2 - IEEE Transactions on Microwave Theory and Techniques DA - 2000-05-05 00:05:00 LA - en PB - IEEE Transactions on Microwave Theory and Techniques PY - 2000 TI - Quasi-TEM Characteristic Impedance of Micromachined CMOS Coplanar Waveguides ER -