TY - JOUR AU - Cassard, Janet AU - Parameswaran, M. AU - Zaghloul, Mona AU - Gaitan, Michael C2 - IEEE Circuits & Devices DA - 1992-11-01 00:11:00 LA - en M1 - 8 PB - IEEE Circuits & Devices PY - 1992 TI - High-Level CAD Melds Micromachined Devices with Foundries ER -