TY  - JOUR
AU  - Allen, Richard
AU  - Headley, T
AU  - Everist, Sarah
AU  - Ghoshtagore, Rathindra
AU  - Cresswell, Michael
AU  - Linholm, Loren
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2001-02-01 00:02:00
LA  - en
M1  - 14
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2001
TI  - High-Resolution Transmission Electron Microscopy Calibration of Critical Dimension Reference Materials
ER  -