TY  - CONF
AU  - Huff, H.
AU  - Richter, Curt
AU  - Green, M.
AU  - Lucovsky, G.
AU  - Hattori, T.
C2  - Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA
DA  - 1999-09-01 00:09:00
LA  - en
PB  - Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA
PY  - 1999
TI  - Ultrathin SiO<sub>2</sub> and High-K Materials for ULSI Gate Dielectrics
ER  -