TY  - JOUR
AU  - Cavicchi, Richard
AU  - Suehle, John
AU  - Kreider, Kenneth
AU  - Shomaker, B.
AU  - Small, John
AU  - Gaitan, Michael
AU  - Chaparala, P
C2  - Applied Physics Letters
DA  - 1995-02-13 00:02:00
LA  - en
M1  - 66
PB  - Applied Physics Letters
PY  - 1995
TI  - Growth of SnO<sub>2</sub> Films on Micromachined Hotplates
ER  -