TY - GEN AU - Cassard, Janet AU - Cresswell, Michael AU - Hood, Colleen AU - Linholm, Loren AU - Roitman, Peter C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1993-01-01 00:01:00 LA - en M1 - 4890 PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1993 TI - The Test Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4 ER -