TY  - GEN
AU  - Cassard, Janet
AU  - Cresswell, Michael
AU  - Hood, Colleen
AU  - Linholm, Loren
AU  - Roitman, Peter
AU  - Zaghloul, Mona
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1993-01-01 00:01:00
LA  - en
M1  - 4889
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1993
TI  - The Design Guide for CMOS-on-SIMOX Test Chips NIST3 and NIST4
ER  -