TY  - GEN
AU  - Cassard, Janet
AU  - Gaitan, Michael
AU  - Zaghloul, Mona
AU  - Novotny, Donald
AU  - Tyree, V.
AU  - Pi, J.
AU  - Pina, C.
AU  - Hansford, W.
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-06-01 00:06:00
LA  - en
M1  - 5402
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Realizing Suspended Structures on Chips Fabricated by CMOS Foundry Processes through the MOSIS Service
ER  -