TY  - CONF
AU  - Krause, S.
AU  - Park, J
AU  - Lee, J.
AU  - El-Ghor, M.
AU  - Roitman, Peter
C2  - Proc.,  IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
DA  - 1992-12-31 00:12:00
LA  - en
PB  - Proc.,  IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
PY  - 1992
TI  - Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material
ER  -