TY - GEN AU - Mattis, R. AU - Belzer, Barbara C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1992-10-01 00:10:00 LA - en M1 - 4925 PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1992 TI - STREMDA: A Front-End to the MAIN1 Program for Characterizing Standard Reference Silicon Dioxide Layers ER -