TY  - JOUR
AU  - Dura, Joseph
AU  - Richter, Curt
AU  - Majkrzak, Charles
AU  - Nguyen, Nhan
C2  - Applied Physics Letters
DA  - 1998-10-12 00:10:00
LA  - en
M1  - 73
PB  - Applied Physics Letters
PY  - 1998
TI  - Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si
ER  -