TY  - JOUR
AU  - Steiner, B.
AU  - Tseng, W.
AU  - Comas, J.
AU  - Laor, U.
AU  - Dobbyn, R.
C2  - Journal of Crystal Growth
DA  - 1993-08-01 00:08:00
LA  - en
M1  - 128
PB  - Journal of Crystal Growth
PY  - 1993
TI  - Defect Formation in Semiconductor Layers During Epitaxial Growth
ER  -