TY  - CONF
AU  - Allen, Richard
AU  - Troccolo, P.
AU  - II, James OwenI
AU  - Potzick, James
AU  - Postek, Michael
AU  - Linholm, Loren
C2  - Proceedings of the SPIE, , USA
DA  - 1993-09-01 00:09:00
LA  - en
PB  - Proceedings of the SPIE, , USA
PY  - 1993
TI  - Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
ER  -