TY  - SER
AU  - Chi, P
AU  - Simons, David
AU  - Roitman, Peter
AU  - Hughes, H.
C2  - , 
DA  - 1991-12-31 00:12:00
LA  - en
PB  - , 
PY  - 1991
TI  - Quantitative Depth Profiling of Aluminum-Implanted SIMOX by Use of Secondary Ion Mass Spectrometry
ER  -