TY  - CONF
AU  - Postek, Michael
AU  - Keery, William
AU  - Frederick, Nolan
C2  - Proc., Scanning 90, Mahwah, NJ, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Proc., Scanning 90, Mahwah, NJ, USA
PY  - 1990
TI  - Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology
ER  -