TY - CONF AU - McMarr, P. AU - Mrstik, B. AU - Twigg, M. AU - Hughes, H. AU - Anc, M. AU - Roitman, Peter AU - Garcia, G. C2 - Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA DA - 1997-12-31 00:12:00 LA - en PB - Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA PY - 1997 TI - Optimization of the Electrical Properties of Low-Dose SIMOX Wafers ER -