TY  - CONF
AU  - Chandler-Horowitz, Deane
AU  - Marchiando, Jay
AU  - Doss, M.
AU  - Krause, S.
AU  - Visitserngtrakul, S.
C2  - Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
DA  - 1990-10-31 00:10:00
LA  - en
PB  - Technical Abstracts of the 1990 IEEE SOS/SOI Technology Conference, Key West, FL, USA
PY  - 1990
TI  - Sensitivity of Ellipsometric Modeling to the
ER  -