TY  - GEN
AU  - Belzer, Barbara
AU  - Eberhardt, K
AU  - Chandler-Horowitz, Deane
AU  - Ehrstein, James
AU  - Durgapal, P.
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1998-04-01 00:04:00
LA  - en
M1  - 400
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1998
TI  - Semiconductor Measurement Techonology: CN-1364 NIST/ VLSI Thin Film Standards: Final Report
ER  -