TY  - CONF
AU  - Schafft, Harry
AU  - Suehle, John
AU  - Mirel, P.
C2  - Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures, Edinburgh, 1, UK
DA  - 1989-12-31 00:12:00
LA  - en
PB  - Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures, Edinburgh, 1, UK
PY  - 1989
TI  - Thermal Conductivity Measurements of Thin-Film Silicon Dioxide
ER  -