TY  - CONF
AU  - Linholm, Loren
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Ghoshtagore, Rathindra
AU  - Mayo, Santos
AU  - Schafft, Harry
AU  - Kramar, John
AU  - Teague, E
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
DA  - 1995-12-31 00:12:00
LA  - en
M1  - 8
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
PY  - 1995
TI  - Measurement of Patterned Film Linewidth for Interconnect Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16737
ER  -