TY  - CONF
AU  - Teague, E
AU  - Linholm, Loren
AU  - Cresswell, Michael
AU  - Penzes, William
AU  - Kramar, John
AU  - Scire, Fredric
AU  - Villarrubia, John
AU  - Jun, Jay
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Sitges, 1, SP
DA  - 1993-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Sitges, 1, SP
PY  - 1993
TI  - Metrology Standards For Advanced Semiconductor Lithography Referenced to Atomic Spacings and Geometry
ER  -