TY  - JOUR
AU  - Witczak, S
AU  - Gaitan, Michael
AU  - Suehle, John
AU  - Peckerar, M.
AU  - Ma, M
C2  - Solid-State Electronics
DA  - 1994-12-31 00:12:00
LA  - en
M1  - 37
PB  - Solid-State Electronics
PY  - 1994
TI  - The Interaction of Stoichiometry, Mechanical Stress and Interface Trap Density in LPCVD Si-Rich SiNx-Si Structures
ER  -