TY  - SER
AU  - Linholm, Loren
AU  - Allen, Richard
AU  - Cresswell, Michael
C2  - SPIE,  
DA  - 1994-12-31 00:12:00
LA  - en
PB  - SPIE,  
PY  - 1994
TI  - Microelectronic Test Structures for Feature Placement and Electrical Linewidth Metrology
ER  -