TY - JOUR AU - Li, H. AU - Ono, Ronald AU - Vale, Leila AU - Rudman, David AU - Liou, Sy-hwang C2 - Applied Physics Letters DA - 1996-10-01 00:10:00 LA - en M1 - 69 PB - Applied Physics Letters PY - 1996 TI - A Novel Multilayer Circuit Process Using YBa2Cu3Ox/SrTiO3 Thin Films Patterned by Wet Etching and Ion Milling ER -