TY  - CONF
AU  - Twigg, M.
AU  - Hughes, H.
AU  - Roitman, Peter
AU  - Allen, L.
C2  - Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA
PY  - 1994
TI  - Measurement of Low Defect Densities in SIMOX Using Transmission Electron Microscopy
ER  -