TY - CONF AU - Thurber, W. AU - Lowney, J AU - Larrabee, Robert AU - Talwar, P. AU - Ehrstein, James C2 - Extended Abstracts of the Electrochemical Society, Los Angeles, CA, USA DA - 1989-12-31 00:12:00 LA - en PB - Extended Abstracts of the Electrochemical Society, Los Angeles, CA, USA PY - 1989 TI - An ac Impedance Method for High-Resistivity Measurements of Silicon ER -