TY  - GEN
AU  - Baghdadi, D.
AU  - Scace, Robert
AU  - Walters, E.
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1989-07-01 00:07:00
LA  - en
M1  - 400
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1989
TI  - Semiconductor Measurement Technology: Database for and Statistical Analysis of the Interlaboratory Determination of the Conversion Coefficient for the Measurement of the Interstitial Oxygen Content of Silicon by Infrared Absorption
ER  -