TY  - CONF
AU  - Park, J
AU  - Krause, S.
AU  - Roitman, Peter
C2  - Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA
DA  - 1991-12-31 00:12:00
LA  - en
PB  - Extended Abstract, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA
PY  - 1991
TI  - Microstructural Changes in Oxygen Implanted SOI Material at Intermediate Annealing Steps in Thermal Ramping
ER  -