TY  - JOUR
AU  - Lee, J.
AU  - Park, J
AU  - Venables, D.
AU  - Krause, S.
AU  - Roitman, Peter
C2  - Applied Physics Letters
DA  - 1993-12-01 00:12:00
LA  - en
M1  - 63
PB  - Applied Physics Letters
PY  - 1993
TI  - Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing
ER  -