TY  - CONF
AU  - Lee, J.
AU  - Park, J
AU  - Krause, S.
AU  - Roitman, Peter
AU  - El-Ghor, M.
C2  - Proc., 1991 Materials Research Society Symposium, Boston, MA, USA
DA  - 1992-12-31 00:12:00
LA  - en
M1  - 235
PB  - Proc., 1991 Materials Research Society Symposium, Boston, MA, USA
PY  - 1992
TI  - Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material
ER  -