TY  - CONF
AU  - Herman, David
AU  - Gaitan, Michael
AU  - DeVoe, Don
C2  - Proc., SEM Conference, Portland, OR, US
DA  - 2001-06-06 00:06:00
LA  - en
PB  - Proc., SEM Conference, Portland, OR, US
PY  - 2001
TI  - MEMS Test Structures for Mechanical Characterization of VLSI Thin Films
ER  -