TY  - JOUR
AU  - Chism, W
AU  - Diebold, Alain
AU  - Canterbury, J
AU  - Richter, Curt
C2  - Solid State Phenomena
DA  - 2001-03-01 00:03:00
LA  - en
M1  - 76-77
PB  - Solid State Phenomena
PY  - 2001
TI  - Characterization and Production Metrology of Thin Transistor Gate Dielectric Films
ER  -