TY  - CONF
AU  - Venables, D.
AU  - Krause, S.
AU  - Park, J
AU  - Lee, J.
AU  - Roitman, Peter
C2  - Proc.,  1993 IEEE SOI Conference, Palm Springs, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc.,  1993 IEEE SOI Conference, Palm Springs, CA, USA
PY  - 1994
TI  - Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX
ER  -