TY  - JOUR
AU  - Dutta, P.
AU  - Candela, G.
AU  - Chandler-Horowitz, Deane
AU  - Marchiando, Jay
AU  - Peckerar, M.
C2  - Applied Physics Letters
DA  - 1988-12-31 00:12:00
LA  - en
M1  - 64
PB  - Applied Physics Letters
PY  - 1988
TI  - Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry
ER  -