TY  - JOUR
AU  - DeSalvo, G.
AU  - Tseng, W.
AU  - Comas, J.
C2  - Journal of the Electrochemical Society
DA  - 1992-03-01 00:03:00
LA  - en
M1  - 139
PB  - Journal of the Electrochemical Society
PY  - 1992
TI  - Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, A1<sub> 0.3</sub>Ga<sub> 0.7</sub>As, In<sub> 0.2</sub>Ga<sub> 0.8</sub>As, in<sub> 0.53</sub>Ga<sub> 0.47</sub>As, In<sub> 0.52</sub>A1<sub> 0.48</sub>As, and InP
ER  -