TY  - GEN
AU  - Cassard, Janet
AU  - Parameswaran, M.
AU  - Zaghloul, Mona
AU  - Gaitan, Michael
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-05-01 00:05:00
LA  - en
M1  - 4865
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process
ER  -