TY  - JOUR
AU  - Zavada, J.
AU  - Wilson, R.
AU  - Comas, J.
C2  - Journal of Applied Physics
DA  - 1989-03-01 00:03:00
LA  - en
M1  - 65
PB  - Journal of Applied Physics
PY  - 1989
TI  - Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing
ER  -