TY  - CONF
AU  - Marchiando, Jay
AU  - Kopanski, Joseph
AU  - Albers, John
C2  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA
DA  - 1999-06-01 00:06:00
LA  - en
PB  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA
PY  - 1999
TI  - Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
ER  -