TY  - GEN
AU  - Vezzetti, C.
AU  - Varner, R.
AU  - Potzick, James
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-01-01 00:01:00
LA  - en
M1  - 260
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Standard Reference Materials: Antireflecting-Chromium Linewidth Standard, SRM 475, for Calibration of Optical Microscope Linewidth Measuring Systems
ER  -